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CDA temperature control system




Product details


The main purpose:

Before the exposure process, make the PR coated on the upper part of the GLS reach a constant temperature state to shorten the Tact Time of the project and prevent the deformation of the PR, which is a constant temperature and humidity chamber system that prevents defects

 

Main technique:

Accurate temperature control heating unit (HCS thermal control system) Siemens S7 programmable control system dual-process precise temperature control tubular cooling system Temperature stability: 23°C±0.5°C Cleanliness: Class1 (ISO14644-1) CDA cleanliness: Comply with ISO12500 standard.

 

Product specification

  KC-6000H KC-12000H
Control System Siemens PLC+Touch Screen
power supply 208V Three phase 50HZ
Equipment size 1200(W)*2100(L)*1700(H) 1400(W)*2500(L)*1700(H)
Total power Min:100W   Max:300W Min:1100W   Max:2100W
Heater 1400W 1800W
CDA Greatest pressure 1Mpa
Intake pressure <0.8Mpa
Intake air temperature <35℃
Temperature control 23±0.5℃
CDA Throughput 2820 LPM  5640LPM
CHW Chilled Water Pressure 0.4~0.6Mpa
Chilled water temperature 14℃
Chilled water flow 22LPM
Cooler Dual-process precise temperature control tube type
Pipe size Air pipeline 2 inch flange
Water pipeline 3/4 inch card holder

 

Cooling system

Reference flow: 22L/Min Max Heat exchanger model: 90 series

Four-pipe double-circuit, cooling and precise control of fluid, control accuracy ±0.5

Advantages: double-loop precise control of cooling temperature, large-scale margin cooling control capability

 

Accurate temperature control heating unit (HCS thermal control system)

Hygienic working condition RA<0.4UM

Stepless regulation, stepless voltage regulation, main control PLC system

Control accuracy 5‰ Controllable range ±0.1°

Main control system: German Semikron silicon controlled rectifier, Siemens programmable controller

The process control adopts dedicated electrical lines to ensure the reliability of electrical circuits. The coding system is used for one line, and the special color isolation system for signal lines ensures safety and reliability, with small interference and high precision.

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