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CDA temperature control system
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Product accessories
Product details
The main purpose:
Before the exposure process, make the PR coated on the upper part of the GLS reach a constant temperature state to shorten the Tact Time of the project and prevent the deformation of the PR, which is a constant temperature and humidity chamber system that prevents defects
Main technique:
Accurate temperature control heating unit (HCS thermal control system) Siemens S7 programmable control system dual-process precise temperature control tubular cooling system Temperature stability: 23°C±0.5°C Cleanliness: Class1 (ISO14644-1) CDA cleanliness: Comply with ISO12500 standard.
Product specification
KC-6000H | KC-12000H | ||
Control System | Siemens PLC+Touch Screen | ||
power supply | 208V Three phase 50HZ | ||
Equipment size | 1200(W)*2100(L)*1700(H) | 1400(W)*2500(L)*1700(H) | |
Total power | Min:100W Max:300W | Min:1100W Max:2100W | |
Heater | 1400W | 1800W | |
CDA | Greatest pressure | 1Mpa | |
Intake pressure | <0.8Mpa | ||
Intake air temperature | <35℃ | ||
Temperature control | 23±0.5℃ | ||
CDA Throughput | 2820 LPM | 5640LPM | |
CHW | Chilled Water Pressure | 0.4~0.6Mpa | |
Chilled water temperature | 14℃ | ||
Chilled water flow | 22LPM | ||
Cooler | Dual-process precise temperature control tube type | ||
Pipe size | Air pipeline | 2 inch flange | |
Water pipeline | 3/4 inch card holder |
Cooling system
Reference flow: 22L/Min Max Heat exchanger model: 90 series
Four-pipe double-circuit, cooling and precise control of fluid, control accuracy ±0.5
Advantages: double-loop precise control of cooling temperature, large-scale margin cooling control capability
Accurate temperature control heating unit (HCS thermal control system)
Hygienic working condition RA<0.4UM
Stepless regulation, stepless voltage regulation, main control PLC system
Control accuracy 5‰ Controllable range ±0.1°
Main control system: German Semikron silicon controlled rectifier, Siemens programmable controller
The process control adopts dedicated electrical lines to ensure the reliability of electrical circuits. The coding system is used for one line, and the special color isolation system for signal lines ensures safety and reliability, with small interference and high precision.
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