CDA temperature control system

Category

CDA（Clean Dry Air）

Product accessories

CDA temperature control system.pptx

Product details

The main purpose:

Before the exposure process, make the PR coated on the upper part of the GLS reach a constant temperature state to shorten the Tact Time of the project and prevent the deformation of the PR, which is a constant temperature and humidity chamber system that prevents defects

Main technique:

Accurate temperature control heating unit (HCS thermal control system) Siemens S7 programmable control system dual-process precise temperature control tubular cooling system Temperature stability: 23°C±0.5°C Cleanliness: Class1 (ISO14644-1) CDA cleanliness: Comply with ISO12500 standard.

Product specification

		KC-6000H	KC-12000H
Control System		Siemens PLC+Touch Screen
power supply		208V Three phase 50HZ
Equipment size		1200（W）2100（L）1700（H）	1400（W）2500（L）1700（H）
Total power		Min:100W Max:300W	Min:1100W Max:2100W
Heater		1400W	1800W
CDA	Greatest pressure	1Mpa
	Intake pressure	＜0.8Mpa
	Intake air temperature	＜35℃
	Temperature control	23±0.5℃
	CDA Throughput	2820 LPM	5640LPM
CHW	Chilled Water Pressure	0.4~0.6Mpa
	Chilled water temperature	14℃
	Chilled water flow	22LPM
	Cooler	Dual-process precise temperature control tube type
Pipe size	Air pipeline	2 inch flange
	Water pipeline	3/4 inch card holder

Cooling system

Reference flow: 22L/Min Max Heat exchanger model: 90 series

Four-pipe double-circuit, cooling and precise control of fluid, control accuracy ±0.5

Advantages: double-loop precise control of cooling temperature, large-scale margin cooling control capability

Accurate temperature control heating unit (HCS thermal control system)

Hygienic working condition RA＜0.4UM

Stepless regulation, stepless voltage regulation, main control PLC system

Control accuracy 5‰ Controllable range ±0.1°

Main control system: German Semikron silicon controlled rectifier, Siemens programmable controller

The process control adopts dedicated electrical lines to ensure the reliability of electrical circuits. The coding system is used for one line, and the special color isolation system for signal lines ensures safety and reliability, with small interference and high precision.

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